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Tsu-Jae King Liu
- Dean of UC Berkeley College of Engineering
- Roy W. Carlson Professor of Engineering
- Faculty member of the Kavli Energy NanoSciences Institute
- Affiliate faculty of the UC Berkeley Applied Science & Technology Graduate Program

Biography:

Liu received her B.S., M.S. and Ph.D. in Electrical Engineering from Stanford University. She subsequently joined the research staff at the Xerox Palo Alto Research Center (PARC). Her time at PARC from 1992-1996 was distinguished by her work on polycrystalline thin-film transistors. In August 1996, Liu joined UC Berkeley as a faculty member of the Electrical Engineering and Computer Science Department. In the course of her research career, Liu has contributed to many developments in the field of semiconductor devices and technology and has co-authored over 500 papers in the field.

Liu's leading contributions span many research areas but she is perhaps best known for the development of polycrystalline silicon-germanium thin film technology for applications in integrated circuits and microsystems. Liu is also the co-inventor of the three-dimensional FinFET transistor (fin field-effect transistor) which is the design that is used in all leading microprocessor chips today. Liu was elected to the National Academy of Engineering "for contributions to the fin field effect transistor (FinFET) and its application to nanometer complementary metal-oxide-semiconductor (CMOS) technology".

She holds over 95 patents and 80 patents pending in the area of semiconductor devices and fabrication methods. 37 of these patents have been assigned to a company she founded, Progressant Technologies Inc., which was acquired by Synopsys Inc.

In her leadership role as Dean of the UC Berkeley College of Engineering, Liu has been outspoken about her commitment to bolster efforts to increase diversity and foster inclusion and respect for women and members of underrepresented minorities in engineering. Prior to assuming her role as Dean, Liu had served in extensive leadership roles at UC Berkeley. She was the faculty director of the UC Berkeley Microfabrication Laboratory (2000-2004, 2006-2008). From 2008-2012, she was Associate Dean for Research in the College of Engineering. She served as Chair of the Electrical Engineering Division from 2012 to 2014. And she then served as Chair of the Electrical Engineering and Computer Science Department from 2014 to 2016.

Liu serves on the Board of Directors of the Intel Corporation since 2016. She was previously Senior Director of Engineering in the Advanced Technology Group of Synopsys, Inc.

Awards:

  • Elected Member, National Academy of Inventors (2018)

  • Elected Member, U.S. National Academy of Engineering (2017)

  • Fellow, Institute of Electrical and Electronics Engineers

  • DARPA Significant Technical Achievement Award, for her work on FinFET (2000)

  • IEEE Kiyo Tomiyasu Award, for her contributions to nanoscale MOS transistors (2010)

  • Outstanding Research Award, Semiconductor Industry Association (2014)

  • Inductee, Silicon Valley Hall of Fame

  • Outstanding Researcher in Nanotechnology Award, Intel (2012) 

  • SIA University Researcher Award (2012) 

  • She has also been recognized for her contributions to teaching and mentorship as a faculty member:

  • Outstanding Teaching Award, Electrical Engineering

  • Distinguished Faculty Mentoring Award, UC Berkeley

  • Aristotle Award, Semiconductor Research Corporation

  • cademy of Inventors (2018)

  • Elected Member, U.S. National Academy of Engineering (2017)

  • Fellow, Institute of Electrical and Electronics Engineers

  • DARPA Significant Technical Achievement Award, for her work on FinFET (2000)

  • IEEE Kiyo Tomiyasu Award, for her contributions to nanoscale MOS transistors (2010)

  • Outstanding Research Award, Semiconductor Industry Association (2014)

  • Inductee, Silicon Valley Hall of Fame

  • Outstanding Researcher in Nanotechnology Award, Intel (2012) 

  • SIA University Researcher Award (2012) 

She has also been recognized for her contributions to teaching and mentorship as a faculty member:

  • Outstanding Teaching Award, Electrical Engineering

  • Distinguished Faculty Mentoring Award, UC Berkeley

  • Aristotle Award, Semiconductor Research Corporation

Pauley Ballroom, MLK Jr. Building, 2nd Floor

2475 Bancroft Way 

Berkeley, CA 94720 

United States

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